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On-site Surface Particle Monitor PartSens

On-site Surface Particle MonitorPartSens

Measures numbers and sizes
of deposited particles in 10 seconds.

  • ISO14644-9
  • ISO14644-13
  • VDA19.2

Innovative “surface cleanliness” monitoring method


Particles size of 5µm or more called "macroparticles" are difficult to measure with an air particle counter as they fall and deposit in a cleanroom. These uncontrolled particles fall and deposit on the surfaces of manufacturing systems, contaminating the manufacturing environment. Furthermore, these particles redisperse in the air and be transported with physical contacts by people and the systems. Once these macroparticles are deposited, it is difficult to control the contamination. An appropriate cleaning program must be established and effective cleaning must be performed to solve the contamination problems.


PartSens is a portable surface monitor that instantly measures the size and number of macroparticles on any surface of a cleanroom manufacturing environment. PartSens classifies the particles into reflective, non-reflective, and fiber. It evaluates various applications related to surface cleanliness such as cleaning efficiency of pre-cleanroom, air showers, floors, walls, equipment, clothes, gloves, and products.

Technical Characteristics

Measurement Technology and Related Standards
ISO14644-9 ISO14644-13
Measurement Range
  • Non-metallic particles
        2µm - >3000µm
  • Metallic particles
      25µm - >3000µm
  • Fibers
      50µm - >3000µm
Measurement Principle
PartSens adopts the ISO based measurement principle and the only instrument listed in VDA19.2 “Technical Cleanliness in Assembly”
The measurement principle of PartSens is in accordance with “direct and indirect measuring procedures” in VDA19.2, as well as “Oblique, glancing, and side-light measurement systems,” the method described in ISO14644-9 Annex D.2.7. As shown in the diagram on the right, the LED lights are illuminated from both sides of the measurement area. A CCD camera captures all surface particles as reflected light via the lens. The maximum diameter and the number of particles are counted in a few seconds from a binary image. This unique technology that detects three-dimensionally raised particles, instead of distinguishing them from the background pattern and simple banalization is suitable for monitoring particles on flat surfaces. Apply Tape Lift Pads on rough surfaces to capture particles trapped in the gaps.
Glancing light technology Glancing light technology
Measuring Method
Tape Lift Pads for measuring cleanliness levels of all surfaces Tape Lift Pads are adhesive strips especially designed for PartSens. These pads enables cleanliness evaluation of particles found on rough and/or curved surfaces such as cleanroom suites, systems, and tools. The use of the pads widens the applications of PartSens, for example, air shower efficiency can be monitored by capturing particles from cleanroom suites before and after entering the room. Tape Lift Pads hold a remarkable 99% adhesion efficiency of particles from smooth surfaces. Tape Lift Pads serve every customer's applications.
Recommended storage conditions
Temperature: 10 - 20℃
Relative Humidity: 60 - 70%
Displaying Results
Featuring new “particle classification” for easy analysis of contamination trends PartSens offers an additional feature that allows users to analyze the sources of contamination in a simplified way. Measured particles are classified into 3 categories (metallic, non-metallic particles, and fibers). Each category is indicated in different colors. Particle size distribution will allow users to see the contamination trends clearly and take necessary measures to improve the cleanliness level.
Features of particle classification Features of particle classification
Optimizing cleaning programs The only way to remove particles on a surface is to establish effective cleaning programs for each surfaces. Clean products and environment can be achieved by targeting the cleanliness level and evaluating and optimizing the cleaning program to reach the goal. The target cleanliness is determined by:
  1. Set the target cleanliness level (the number of the critical particle size/cm2) for each surface and location.
  2. Implement changes to cleaning tools, procedures, number of people, duration, frequency and verify with PartSens.
  3. Document effective methods that reaches the targeted cleanliness level.
  4. Assign trained persons to carry-out cleaning.
The concentration of particles on surfaces must be monitored by PartSens before and after cleaning. Aside from cleaning inspection, PartSens is used to assess the cleanliness of cleanroom suites and particle generation by systems.
Applications of PartSens Applications of PartSens
  • Measurement stand
  • 2 Batteries
  • Power adapter
  • Travel case
  • USB
Consumable goods
  • Tape Lift Pads
  • Bluetooth printer
  • Printer paper rolls

Base unit

Measuring principle Glancing light technology (in accordance with ISO14644-9)
Detectable items Particle sizes , numbers , classifications (particles and fibers)
Detection range(Feret-max) Non-metallic particles 2µm - >3000µm
Metallic particles 25µm - >3000µm
Fibers 50µm - >3000µm
Particle size allocation According to VDA19.1 and ISO16232
Display types Distributive, Distributive/1000 cm², Cumulative, Cumulative/1000 cm²
Measuring time <10 sec.
Data storage capacity 300 data
Screen type Touch screen, 12.1” TFT
Languages English, Japanese, German, French
Screen resolution 3872 × 2764 (pixels)
Outputs Network ( TCP/IP ) , USB Type A, HDMI
Power supply AC 100-240 V AC-1, 4 A 50/60 Hz | DC 24 VDC @ 5A
Lithium-ion battery 2 × Nominal Voltage 11.1 V, 7800 mAh,
86, 58 W max.
Weight 7.7kg, 6.7kg
Application temperature range 5 - 30 ℃ ; 20 - 95% (RH) non-condensing
Storage conditions 0 - 50 ℃ ; up to 98% (RH) non-condensing

Measuring head

Measuring area 2.68cm2 (19.36 × 13.82mm)
Data transmission WLAN 2.4 GHz
Range of mobile measuring head Operating range max. 10 meters away from the base unit
Power supply Lithium-ion battery
Calibration Once a year recommended
Measuring device for tape lift pads Included
Screen type Touch screen, LCD
More Information

More Details

Practical, Easy, and Accurate monitoring

Traditionally, the use of airborne particle counters and microscopes were believed to be the best method for assessing a surface cleanliness level. However, these methods are not practical for monitoring macroparticles (≥5µm) because airborne particle counters can only detect particles that are small enough to keep floating in the air and can be vacummed by the particle counter, leaving all the macroparticles which falls onto surfaces undetected. Microscopes are not effective either, for they have a possibility of cross-contaminating samples. Cleanroom flashlights for visualizing contaminants also cannot detect macroparticles for cleanrooms required to control particles smaller than 100µm. PartSens is the only monitoring device to be listed in VDA 19.2 “Technical cleanliness in assembly” that replaces obsolete inspection methods, leading an innovative approach to prevent “transfer,” “contact,” and “deposition” of particles in a clean environment.

Monitor “deposition” and “contact transfer” of particles Learning the process of surface contamination to know the risks

Depending on the mass and the air current, particles larger than ≥5-25µm eventually deposits and contaminate all surfaces. Particles on surfaces cannot be removed by Fan Filter Units, hence referred to as “unfiltered particles.” Walking, cleaning or any other activities cause these particles to be transferred to other areas of the facility or re-dispersed into the air, creating higher risks of contamination.

Percentage of particles removed by cleanroom airflow or deposited onto surfaces(room height 2.7m) Percentage of particles removed by cleanroom airflow or deposited onto surfaces room height 2.7m


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